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High-Density Planar Plasma Production by Surface Wave Excitation(表面波による高密度平板状プラズマの生成) High-Density Planar Plasma Production Surface Wave Excitation 表面波 高 密度 平板状 プラズマ 生成

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著者

    • Ivan Petrov Ghanashev イブアン ベトロフ ガナシエフ

書誌事項

タイトル

High-Density Planar Plasma Production by Surface Wave Excitation(表面波による高密度平板状プラズマの生成)

タイトル別名

High-Density Planar Plasma Production Surface Wave Excitation 表面波 高 密度 平板状 プラズマ 生成

著者名

Ivan Petrov Ghanashev

著者別名

イブアン ベトロフ ガナシエフ

学位授与大学

名古屋大学

取得学位

博士 (工学)

学位授与番号

甲第4279号

学位授与年月日

1999-03-25

注記・抄録

博士論文

目次

  1. Contents / p1 (0003.jp2)
  2. 1 Introduction / p1 (0007.jp2)
  3. 1.1 Background / p1 (0007.jp2)
  4. 1.2 Composition of the dissertation / p2 (0008.jp2)
  5. 1.3 Electromagnetic and electrostatic waves in non-magnetized plasmas / p4 (0009.jp2)
  6. 1.4 Review of large-area surface-wave plasma tools / p14 (0014.jp2)
  7. 1.5 Advantages of slot-excited surface-wave plasmas / p21 (0017.jp2)
  8. 2 Eigen-Modes Theory for Homogeneous Plasma / p27 (0020.jp2)
  9. 2.1 Introduction / p27 (0020.jp2)
  10. 2.2 Dispersion equation / p28 (0021.jp2)
  11. 2.3 Approximations for the pure surface modes / p39 (0026.jp2)
  12. 2.4 Discussion / p42 (0028.jp2)
  13. 3 Eigen-Modes Theory for Axially Inhomogeneous Plasma / p50 (0032.jp2)
  14. 3.1 Step density profile model / p50 (0032.jp2)
  15. 3.2 Continuous density profile model / p52 (0033.jp2)
  16. 3.3 Numerical results and comparison with experiment / p56 (0035.jp2)
  17. 4 Experimental Apparatus and Methods / p63 (0038.jp2)
  18. 4.1 Geometry and operation / p63 (0038.jp2)
  19. 4.2 Measurement techniques / p66 (0040.jp2)
  20. 5 Experimental Mode Identification of the Pure Surface Modes / p72 (0043.jp2)
  21. 5.1 Introduction / p72 (0043.jp2)
  22. 5.2 Light emission patterns and microwave intensity profiles / p73 (0043.jp2)
  23. 5.3 Plasma parameters / p77 (0045.jp2)
  24. 5.4 Penetration depths / p77 (0045.jp2)
  25. 5.5 Summary / p81 (0047.jp2)
  26. 6 Experimental Mode Identification of the Hybrid Surface Modes / p84 (0049.jp2)
  27. 6.1 Introduction / p84 (0049.jp2)
  28. 6.2 Experimental results and discussion / p85 (0049.jp2)
  29. 6.3 Conclusion / p91 (0052.jp2)
  30. 7 Mode Jumps,Hysteresis Loops and Stability / p94 (0054.jp2)
  31. 7.1 Introduction / p94 (0054.jp2)
  32. 7.2 Energy balance equation / p96 (0055.jp2)
  33. 7.3 Power reflection and absorption coefficients / p97 (0055.jp2)
  34. 7.4 Mean power for sustaining one electron-ion pair / p102 (0058.jp2)
  35. 7.5 Stability criterion / p103 (0058.jp2)
  36. 7.6 Discussion and conclusion / p105 (0059.jp2)
  37. 8 Power Reflection Coefficient Measurements / p111 (0062.jp2)
  38. 8.1 Introduction / p111 (0062.jp2)
  39. 8.2 Experimental Set-Up / p112 (0063.jp2)
  40. 8.3 Experimental Results and Discussion / p116 (0065.jp2)
  41. 8.4 Conclusion / p127 (0070.jp2)
  42. 9 Surface-Wave Excitated Localized Plasma Oscillations / p130 (0072.jp2)
  43. 9.1 Introduction / p130 (0072.jp2)
  44. 9.2 Experimental set-up / p135 (0074.jp2)
  45. 9.3 Results and Discussion / p138 (0076.jp2)
  46. 9.4 Conclusion / p146 (0080.jp2)
  47. Summary / p149 (0081.jp2)
  48. Acknowledgments / p152 (0083.jp2)
  49. A List of Papers and Presentations / p153 (0083.jp2)
  50. A.1 Journal articles / p153 (0083.jp2)
  51. A.2 Presentations at international conferences / p155 (0084.jp2)
  52. A.3 Other publications / p158 (0086.jp2)
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各種コード

  • NII論文ID(NAID)
    500000172982
  • NII著者ID(NRID)
    • 8000000173258
  • DOI(NDL)
  • NDL書誌ID
    • 000000337296
  • データ提供元
    • NDL-OPAC
    • NDLデジタルコレクション
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