High-Density Planar Plasma Production by Surface Wave Excitation(表面波による高密度平板状プラズマの生成) High-Density Planar Plasma Production Surface Wave Excitation 表面波 高 密度 平板状 プラズマ 生成

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Author

    • Ivan Petrov Ghanashev イブアン ベトロフ ガナシエフ

Bibliographic Information

Title

High-Density Planar Plasma Production by Surface Wave Excitation(表面波による高密度平板状プラズマの生成)

Other Title

High-Density Planar Plasma Production Surface Wave Excitation 表面波 高 密度 平板状 プラズマ 生成

Author

Ivan Petrov Ghanashev

Author(Another name)

イブアン ベトロフ ガナシエフ

University

名古屋大学

Types of degree

博士 (工学)

Grant ID

甲第4279号

Degree year

1999-03-25

Note and Description

博士論文

Table of Contents

  1. Contents/p1 (3コマ目)
  2. 1 Introduction/p1 (7コマ目)
  3. 1.1 Background/p1 (7コマ目)
  4. 1.2 Composition of the dissertation/p2 (8コマ目)
  5. 1.3 Electromagnetic and electrostatic waves in non-magnetized plasmas/p4 (9コマ目)
  6. 1.4 Review of large-area surface-wave plasma tools/p14 (14コマ目)
  7. 1.5 Advantages of slot-excited surface-wave plasmas/p21 (17コマ目)
  8. 2 Eigen-Modes Theory for Homogeneous Plasma/p27 (20コマ目)
  9. 2.1 Introduction/p27 (20コマ目)
  10. 2.2 Dispersion equation/p28 (21コマ目)
  11. 2.3 Approximations for the pure surface modes/p39 (26コマ目)
  12. 2.4 Discussion/p42 (28コマ目)
  13. 3 Eigen-Modes Theory for Axially Inhomogeneous Plasma/p50 (32コマ目)
  14. 3.1 Step density profile model/p50 (32コマ目)
  15. 3.2 Continuous density profile model/p52 (33コマ目)
  16. 3.3 Numerical results and comparison with experiment/p56 (35コマ目)
  17. 4 Experimental Apparatus and Methods/p63 (38コマ目)
  18. 4.1 Geometry and operation/p63 (38コマ目)
  19. 4.2 Measurement techniques/p66 (40コマ目)
  20. 5 Experimental Mode Identification of the Pure Surface Modes/p72 (43コマ目)
  21. 5.1 Introduction/p72 (43コマ目)
  22. 5.2 Light emission patterns and microwave intensity profiles/p73 (43コマ目)
  23. 5.3 Plasma parameters/p77 (45コマ目)
  24. 5.4 Penetration depths/p77 (45コマ目)
  25. 5.5 Summary/p81 (47コマ目)
  26. 6 Experimental Mode Identification of the Hybrid Surface Modes/p84 (49コマ目)
  27. 6.1 Introduction/p84 (49コマ目)
  28. 6.2 Experimental results and discussion/p85 (49コマ目)
  29. 6.3 Conclusion/p91 (52コマ目)
  30. 7 Mode Jumps,Hysteresis Loops and Stability/p94 (54コマ目)
  31. 7.1 Introduction/p94 (54コマ目)
  32. 7.2 Energy balance equation/p96 (55コマ目)
  33. 7.3 Power reflection and absorption coefficients/p97 (55コマ目)
  34. 7.4 Mean power for sustaining one electron-ion pair/p102 (58コマ目)
  35. 7.5 Stability criterion/p103 (58コマ目)
  36. 7.6 Discussion and conclusion/p105 (59コマ目)
  37. 8 Power Reflection Coefficient Measurements/p111 (62コマ目)
  38. 8.1 Introduction/p111 (62コマ目)
  39. 8.2 Experimental Set-Up/p112 (63コマ目)
  40. 8.3 Experimental Results and Discussion/p116 (65コマ目)
  41. 8.4 Conclusion/p127 (70コマ目)
  42. 9 Surface-Wave Excitated Localized Plasma Oscillations/p130 (72コマ目)
  43. 9.1 Introduction/p130 (72コマ目)
  44. 9.2 Experimental set-up/p135 (74コマ目)
  45. 9.3 Results and Discussion/p138 (76コマ目)
  46. 9.4 Conclusion/p146 (80コマ目)
  47. Summary/p149 (81コマ目)
  48. Acknowledgments/p152 (83コマ目)
  49. A List of Papers and Presentations/p153 (83コマ目)
  50. A.1 Journal articles/p153 (83コマ目)
  51. A.2 Presentations at international conferences/p155 (84コマ目)
  52. A.3 Other publications/p158 (86コマ目)
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Codes

  • NII Article ID (NAID)
    500000172982
  • NII Author ID (NRID)
    • 8000000173258
  • DOI(NDL)
  • NDLBibID
    • 000000337296
  • Source
    • NDL ONLINE
    • NDL Digital Collections

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