Preparations of ferroelectric PbZrxTil-xO3 thin films and their applications to photoconductor-ferroelectric memory 強誘電体PbZrxTil-xO3薄膜の作製と光伝導・強誘電体メモリへの応用
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著者
書誌事項
- タイトル
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Preparations of ferroelectric PbZrxTil-xO3 thin films and their applications to photoconductor-ferroelectric memory
- タイトル別名
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強誘電体PbZrxTil-xO3薄膜の作製と光伝導・強誘電体メモリへの応用
- 著者名
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王, 文生
- 著者別名
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オウ, ブンセイ
- 学位授与大学
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富山県立大学
- 取得学位
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博士 (工学)
- 学位授与番号
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甲第12号
- 学位授与年月日
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2000-03-24
注記・抄録
博士論文
資料形態 : テキストデータ プレーンテキスト
コレクション : 国立国会図書館デジタルコレクション > デジタル化資料 > 博士論文
乱丁あり
目次
- CONTENTS
- Preface
- Chapter 1 Introduction
- 1.1 Introduction
- 1.2 Photoconductive-Ferroelectric Memory
- 1.3 Current Materials
- References
- Chapter 2 Preparation and Properties of the Substrates and PLT Buffer Layer
- 2.1 Introduction
- 2.2 Sputtering Apparatus
- 2.3 Substrates
- 2.4 Preparation of SiO₂ Thin Film
- 2.5 Preparation of Ti, Pt and Ir Thin Film
- 2.6 Preparation of PLT Thin Film
- 2.7 Summary
- References
- Chapter 3 Preparation and Structure Properties of Rhombohedral PZT Thin Films by magnetron Sputtering Method
- 3.1 Introduction
- 3.2 Preparation of PLT, PZT Thin Films
- 3.3 Structural of PZT Films
- 3.4 Summary
- References
- Chapter 4 Electrical Properties of Rhombohedral PZT Thin Films by RF Magnetron Sputtering Method
- 4.1 Introduction
- 4.2 Preparation of Rhombohedral PZT Thin Films
- 4.3 Electric properties of Rhombohedral PZT Thin Films
- 4.4 Summary
- References
- Chapter 5 Preparation and Electrical Properties of Sol-Gel Zr-rich Derived PZT Thin Films
- 5.1 Introduction
- 5.2 Experimental Procedure
- 5.3 Structure of Sol-gel Derived Zr-rich PZT Thin Films
- 5.4 Electric properties of Sol-gel Derived Zr-rich PZT Thin Films
- 5.5 Summary
- References
- Chapter 6 Preparation and Properties of Amorphous Silicon,ITO Thin Films by RF Magnetron Sputtering Method
- 6.1 Introduction
- 6.2 Preparation and Properties of ITO Thin Films
- 6.3 Preparation of Amorphous Silicon Thin Films
- 6.4 Properties of Amorphous Silicon Thin Films
- 6.5 Summary
- References
- Chapter 7 Preparation of Photoconductive Ferroelectric Memory
- 7.1 Introduction
- 7.2 Principle of Photoconductive Ferroelectric Memory
- 7.3 Preparation of Photoconductive Ferroelectric Memory
- 7.4 Properties of Photoconductive Ferroelectric Memory
- 7.5 Summary
- References
- Chapter 8 Conclusions
- Acknowledgements
- List of Publications
- List of Abbreviations