Preparations of ferroelectric PbZrxTil-xO3 thin films and their applications to photoconductor-ferroelectric memory 強誘電体PbZrxTil-xO3薄膜の作製と光伝導・強誘電体メモリへの応用
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著者
書誌事項
- タイトル
-
Preparations of ferroelectric PbZrxTil-xO3 thin films and their applications to photoconductor-ferroelectric memory
- タイトル別名
-
強誘電体PbZrxTil-xO3薄膜の作製と光伝導・強誘電体メモリへの応用
- 著者名
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王, 文生
- 著者別名
-
オウ, ブンセイ
- 学位授与大学
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富山県立大学
- 取得学位
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博士 (工学)
- 学位授与番号
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甲第12号
- 学位授与年月日
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2000-03-24
注記・抄録
博士論文
目次
- CONTENTS / p1 (0005.jp2)
- Preface / p1 (0003.jp2)
- Chapter 1 Introduction / p1 (0007.jp2)
- 1.1 Introduction / p1 (0007.jp2)
- 1.2 Photoconductive-Ferroelectric Memory / p3 (0008.jp2)
- 1.3 Current Materials / p6 (0010.jp2)
- References / p10 (0012.jp2)
- Chapter 2 Preparation and Properties of the Substrates and PLT Buffer Layer / p15 (0014.jp2)
- 2.1 Introduction / p15 (0014.jp2)
- 2.2 Sputtering Apparatus / p16 (0015.jp2)
- 2.3 Substrates / p18 (0016.jp2)
- 2.4 Preparation of SiO₂ Thin Film / p19 (0016.jp2)
- 2.5 Preparation of Ti, Pt and Ir Thin Film / p22 (0018.jp2)
- 2.6 Preparation of PLT Thin Film / p22 (0018.jp2)
- 2.7 Summary / p30 (0022.jp2)
- References / p32 (0023.jp2)
- Chapter 3 Preparation and Structure Properties of Rhombohedral PZT Thin Films by magnetron Sputtering Method / p35 (0024.jp2)
- 3.1 Introduction / p35 (0024.jp2)
- 3.2 Preparation of PLT, PZT Thin Films / p38 (0026.jp2)
- 3.3 Structural of PZT Films / p41 (0027.jp2)
- 3.4 Summary / p55 (0034.jp2)
- References / p56 (0035.jp2)
- Chapter 4 Electrical Properties of Rhombohedral PZT Thin Films by RF Magnetron Sputtering Method / p59 (0036.jp2)
- 4.1 Introduction / p59 (0036.jp2)
- 4.2 Preparation of Rhombohedral PZT Thin Films / p60 (0037.jp2)
- 4.3 Electric properties of Rhombohedral PZT Thin Films / p62 (0038.jp2)
- 4.4 Summary / p82 (0048.jp2)
- References / p83 (0048.jp2)
- Chapter 5 Preparation and Electrical Properties of Sol-Gel Zr-rich Derived PZT Thin Films / p85 (0049.jp2)
- 5.1 Introduction / p85 (0049.jp2)
- 5.2 Experimental Procedure / p86 (0050.jp2)
- 5.3 Structure of Sol-gel Derived Zr-rich PZT Thin Films / p89 (0051.jp2)
- 5.4 Electric properties of Sol-gel Derived Zr-rich PZT Thin Films / p92 (0053.jp2)
- 5.5 Summary / p97 (0055.jp2)
- References / p97 (0055.jp2)
- Chapter 6 Preparation and Properties of Amorphous Silicon,ITO Thin Films by RF Magnetron Sputtering Method / p99 (0056.jp2)
- 6.1 Introduction / p99 (0056.jp2)
- 6.2 Preparation and Properties of ITO Thin Films / p100 (0057.jp2)
- 6.3 Preparation of Amorphous Silicon Thin Films / p105 (0059.jp2)
- 6.4 Properties of Amorphous Silicon Thin Films / p105 (0059.jp2)
- 6.5 Summary / p110 (0062.jp2)
- References / p111 (0062.jp2)
- Chapter 7 Preparation of Photoconductive Ferroelectric Memory / p113 (0063.jp2)
- 7.1 Introduction / p113 (0063.jp2)
- 7.2 Principle of Photoconductive Ferroelectric Memory / p114 (0064.jp2)
- 7.3 Preparation of Photoconductive Ferroelectric Memory / p120 (0067.jp2)
- 7.4 Properties of Photoconductive Ferroelectric Memory / p120 (0067.jp2)
- 7.5 Summary / p127 (0070.jp2)
- References / p127 (0070.jp2)
- Chapter 8 Conclusions / p129 (0071.jp2)
- Acknowledgements / p135 (0074.jp2)
- List of Publications / p137 (0075.jp2)
- List of Abbreviations / p139 (0076.jp2)