Defect Formation in Transparent Materials for vacuum-uv Optics by Energetic Photon or Ion Beams 高エネルギーフォトンまたはイオンビーム照射による真空紫外用光学材料中の欠陥生成
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著者
書誌事項
- タイトル
-
Defect Formation in Transparent Materials for vacuum-uv Optics by Energetic Photon or Ion Beams
- タイトル別名
-
高エネルギーフォトンまたはイオンビーム照射による真空紫外用光学材料中の欠陥生成
- 著者名
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水口, 雅史
- 著者別名
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ミズグチ, マサフミ
- 学位授与大学
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東京工業大学
- 取得学位
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博士 (工学)
- 学位授与番号
-
甲第4399号
- 学位授与年月日
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2000-03-26
注記・抄録
博士論文
目次
- 論文目録 / (0002.jp2)
- CONTENTS / (0005.jp2)
- 1 General Introduction / p1 (0008.jp2)
- 1.1 Road Map of Photolithography / p1 (0008.jp2)
- 1.2 Color Centers in CaF₂ Single Crystals / p2 (0009.jp2)
- 1.3 UV Laser-Induced Defects in SiO₂ Glasses / p4 (0011.jp2)
- 1.4 Ion Implantation-Induced Defects in SiO₂ Glasses / p5 (0012.jp2)
- 1.5 Objectives and Outline / p6 (0013.jp2)
- References / p7 (0014.jp2)
- Figures / p9 (0016.jp2)
- 2 Color Center Formation in CaF₂ Single Crystalsby ArF Excimer Laser Irradiation / p15 (0022.jp2)
- 2.1 Introduction / p15 (0022.jp2)
- 2.2 Experimental / p17 (0024.jp2)
- 2.3 Results / p18 (0025.jp2)
- 2.4 Discussion / p20 (0027.jp2)
- 2.5 Summary / p24 (0031.jp2)
- References / p25 (0032.jp2)
- Tables and Figures / p27 (0034.jp2)
- 3 Time-Resolved Photoluminescence for Diagnosisof Laser-Damage Toughness / p37 (0044.jp2)
- 3.1 Introduction / p37 (0044.jp2)
- 3.2 Experimental / p39 (0046.jp2)
- 3.3 Results / p40 (0047.jp2)
- 3.4 Discussion / p44 (0051.jp2)
- 3.5 Summary / p47 (0054.jp2)
- References / p49 (0056.jp2)
- Tables and Figures / p51 (0058.jp2)
- 4 Photochemical Processes Induced by F₂ Excimer Laser Irradiation in SiO₂ Glasses / p63 (0070.jp2)
- 4.1 Introduction / p64 (0071.jp2)
- 4.2 Experimental / p65 (0072.jp2)
- 4.3 Results / p66 (0073.jp2)
- 4.4 Discussion / p70 (0077.jp2)
- 4.5 Summary / p75 (0082.jp2)
- References / p77 (0084.jp2)
- Tables and Figures / p79 (0086.jp2)
- 5 Pulsed EPR Measurements of F₂ Laser-Damaged SiO₂ Glass / p93 (0100.jp2)
- 5.1 Introduction / p94 (0101.jp2)
- 5.2 Experimental / p98 (0105.jp2)
- 5.3 Results / p99 (0106.jp2)
- 5.4 ESEEM Simulation / p101 (0108.jp2)
- 5.5 Summary / p108 (0115.jp2)
- References / p109 (0116.jp2)
- Figures / p111 (0118.jp2)
- 6 Analysis of Hyperfine Structures of E'-Type Centers in SiO₂ Glass Implanted with ²⁹Si Ion / p118 (0125.jp2)
- 6.1 Introduction / p119 (0126.jp2)
- 6.2 Experimental / p120 (0127.jp2)
- 6.3 Identification of Four Sets of Doublets / p122 (0129.jp2)
- 6.5 Depth Profiles of the Defects and Structural Change / p128 (0135.jp2)
- 6.6 Summary / p132 (0139.jp2)
- References / p133 (0140.jp2)
- Figures / p135 (0142.jp2)
- 7 General Conclusion / p144 (0151.jp2)
- Publication List / p149 (0156.jp2)
- Acknowledgment / p153 (0160.jp2)