Integrated movable micro mechanical structures for sensors and actuators
収録刊行物
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- IEEE Trans. Electron Devices
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IEEE Trans. Electron Devices 35 (6), 724-730, 1988
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詳細情報
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- CRID
- 1570572701685768832
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- NII論文ID
- 80003876736
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- データソース種別
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- CiNii Articles