Mechanical Deflection of Cantilever Microbeams : A New Technique for Testing the Mechanical Properties of Thin Films

• WEIHS T. P.

収録刊行物

• J. Mater. Res.

  J. Mater. Res. 3 931-942, 1988

詳細情報

• CRID: 1570854176667564288
• NII論文ID: 80004211577
• データソース種別:
  • CiNii Articles