Spatially and temporally resolved laser-induced fluorescence measurements of CF_2 and CF radicals in a CF_4 rf plasma

• BOOTH J. P.

Journal

• J. Appl. Phys.

  J. Appl. Phys. 66 (11), 5251-5257, 1989

Details

• CRID: 1572543026529024000
• NII Article ID: 80004860251
• NII Book ID: AA00693547
• Data Source:
  • CiNii Articles