Local oxidation of GaP wafers heated by Nd:YAG laser beam
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Journal
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- J. Appl. Phys.
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J. Appl. Phys. 67 1272-1278, 1990
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Details 詳細情報について
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- CRID
- 1572543026544887808
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- NII Article ID
- 80005036776
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- NII Book ID
- AA00693547
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- Data Source
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- CiNii Articles