Ultrahigh vacuum precise positioning device utilizing rapid deformations of piezoelectric elements

DOI PDF 被引用文献11件
  • Y. Yamagata
    Institute of Industrial Science, University of Tokyo, Roppongi 7-22-1, Minato-ku, Tokyo, 106, Japan
  • T. Higuchi
    Institute of Industrial Science, University of Tokyo, Roppongi 7-22-1, Minato-ku, Tokyo, 106, Japan
  • H. Saeki
    National Laboratory for High Energy Physics, 1-1 Oho, Tsukuba-shi, Ibaraki-ken, 305, Japan
  • H. Ishimaru
    National Laboratory for High Energy Physics, 1-1 Oho, Tsukuba-shi, Ibaraki-ken, 305, Japan

抄録

<jats:p>Recently precise positioning devices with low outgassing rates have been required for production systems of very large scale integrated circuits, surface analysis systems, and scanning tunneling microscopes in ultrahigh vacuum. A bakable XYθ three-axis positioning table using a unique positioning mechanism utilizing friction and inertial forces caused by rapid deformations of piezoelectric elements was developed. The table has a hexagonal shape of 120 mm in diameter and is mainly made of aluminum alloys with an EX-process. The table has three feet with an Si3N4 ball on each bottom side and set on a plate made of Pyrex glass. The table was able to operate in an ultrahigh vacuum environment of the order of 10−12 Torr.</jats:p>

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