The photolytic laser chemical vapor deposition rate of platinum, its dependence on wavelength, precursor vaper pressure, light intensity, and laser beam diameter

• BRAICHOTTE D.

収録刊行物

• Applied Surface Science

  Applied Surface Science 46 9-18, 1990

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• CRID: 1572824501523631872
• NII論文ID: 80005623351
• データソース種別:
  • CiNii Articles