The Synthesis of Cubic BN Films Using a Hot Cathode Plasma Discharge in a Parallel Magnetic Field

• MURAKAWA M.

収録刊行物

• Surf.Coat.Tech.

  Surf.Coat.Tech. 43 128-136, 1990

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• CRID: 1570572701709488256
• NII論文ID: 80005755734
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