Use of the Electrical Classification Method to Size 0.1 ?m SRM Particles-A Feasibility Study

• KINNEY P. D.

収録刊行物

• J. Res. Natl. Inst. Stand. Technol.

  J. Res. Natl. Inst. Stand. Technol. 96 147-176, 1991

詳細情報

• CRID: 1571980076595093120
• NII論文ID: 80005895948
• NII書誌ID: AA10702258
• データソース種別:
  • CiNii Articles