Ion Energy Distribution Functions in a Multipole Confined Argon Plasma Diffusing from a 13.56-MHz Helicon Source

• CHARLES C.

収録刊行物

• J. Vac. Sci. Technol.

  J. Vac. Sci. Technol. 11 157-163, 1993

詳細情報

• CRID: 1572261551586517248
• NII論文ID: 80006895004
• NII書誌ID: AA10635106
• データソース種別:
  • CiNii Articles