Tin oxide gas ensor fabricated using CMOS micro-hotplates and in-situ processing

• SUEHLE J. S.

収録刊行物

• IEEE Elec. Dev. Let.

  IEEE Elec. Dev. Let. 14 118-120, 1993

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• CRID: 1570009751781030400
• NII論文ID: 80006958351
• データソース種別:
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