Local oxidation of GaP wafers heated by a Nd:YAG laser beam

• KAWAMURA T.

収録刊行物

• J. Appl. Phys.

  J. Appl. Phys. 73 4009-4015, 1993

詳細情報

• CRID: 1572824501527699840
• NII論文ID: 80007042214
• NII書誌ID: AA00693547
• データソース種別:
  • CiNii Articles