Growth of aluminum nitride thin films on Si(111) and Si(001): structural characteristics and development of intrinsic stresses

• MENG W. J.

収録刊行物

• J. Appl. Phys.

  J. Appl. Phys. 75 3446-3455, 1994

詳細情報

• CRID: 1571980076599705472
• NII論文ID: 80007554253
• NII書誌ID: AA00693547
• データソース種別:
  • CiNii Articles