Deep X-ray lithography for the production of three-dimensional microstructures from metals, polymers and ceramics

• EHRFELD W.

Journal

• Radiat. Phys. Chem.

  Radiat. Phys. Chem. 45 (3), 349-365, 1995

Details

• CRID: 1572824501556571008
• NII Article ID: 80008247311
• Data Source:
  • CiNii Articles