Effect of Transport Phenomena on Boron Concentration Profiles in Silicon Epitaxial Wafers

• HABUKA H.

収録刊行物

• J. Electrochem. Soc.

  J. Electrochem. Soc. 143 677-682, 1996

詳細情報

• CRID: 1570291226759515776
• NII論文ID: 80008840783
• データソース種別:
  • CiNii Articles