Suppressing the Formation of Cone Structures in Chemical-Vapor-Deposited Aluminum Nitride/Titanium Nitride Films

• LIU Y. J.

収録刊行物

• J. Am. Ceram. Soc.

  J. Am. Ceram. Soc. 79 1109-1112, 1996

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• CRID: 1571980076622831488
• NII論文ID: 80008937893
• データソース種別:
  • CiNii Articles