Total Room Temperature Wet Cleaning for Si Substrate Surface

• Tadahiro Ohmi

  Department of Electronics, Faculty of Engineering, Tohoku University, Sendai 980, Japan

収録刊行物

• Journal of The Electrochemical Society

  Journal of The Electrochemical Society 143 (9), 2957-2964, 1996-09-01

  The Electrochemical Society

キーワード

• Materials Chemistry
• Electrochemistry
• Surfaces, Coatings and Films
• Condensed Matter Physics
• Renewable Energy, Sustainability and the Environment
• Electronic, Optical and Magnetic Materials

詳細情報

• CRID: 1363951794235127040
• NII論文ID: 80009224145
• DOI: 10.1149/1.1837133
• ISSN: 19457111
• ISSN: 00134651
• ISSN: http://id.crossref.org/issn/00134651
• Web Site: https://iopscience.iop.org/article/10.1149/1.1837133
• Web Site: https://iopscience.iop.org/article/10.1149/1.1837133/pdf
• データソース種別:
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  • CiNii Articles