Crystalline alumina deposited at low temperatures by ionized magnetron sputtering

• SCHNEIDER J. M.

Journal

• J. Vac. Sci. Technol. A

  J. Vac. Sci. Technol. A 15 1084-1088, 1997

Details

• CRID: 1570572700861114368
• NII Article ID: 80009760116
• Data Source:
  • CiNii Articles