Devel-opment of Piezoelectric Self-excitation and Self-detection Mechanism of PZT Micro cantilevers for Dynamic SFm in liq-uid
収録刊行物
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- JVSTB
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JVSTB 4 1559-1563, 1997
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詳細情報
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- CRID
- 1572261550714316800
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- NII論文ID
- 80009843445
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- データソース種別
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- CiNii Articles