Destruction of volatile organic compounds used in a semiconductor industry by a capillary tube discharge reactor

• H. Kohno

• A.A. Berezin

• Jen-Shih Chang

• M. Tamura

• T. Yamamoto

• A. Shibuya

• S. Honda

収録刊行物

• IEEE Transactions on Industry Applications

  IEEE Transactions on Industry Applications 34 (5), 953-966, 1998

  Institute of Electrical and Electronics Engineers (IEEE)

キーワード

• Electrical and Electronic Engineering
• Industrial and Manufacturing Engineering
• Control and Systems Engineering

詳細情報

• CRID: 1362262946439017088
• NII論文ID: 80010598278
• DOI: 10.1109/28.720435
• ISSN: 00939994
• Web Site: http://xplorestaging.ieee.org/ielx4/28/15542/00720435.pdf?arnumber=720435
• データソース種別:
  • Crossref
  • CiNii Articles