Direct current high-pressure glow discharges

DOI PDF 被引用文献24件
  • Robert H. Stark
    Physical Electronics Research Institute, Old Dominion University, Norfolk, Virginia 23529
  • Karl H. Schoenbach
    Physical Electronics Research Institute, Old Dominion University, Norfolk, Virginia 23529

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<jats:p>Stabilization and control of a high-pressure glow discharge by means of a microhollow cathode discharge has been demonstrated. The microhollow cathode discharge, which is sustained between two closely spaced electrodes with openings of approximately 100 μm diam, serves as plasma cathode for the high-pressure glow. Small variations in the microhollow cathode discharge voltage generate large variations in the microhollow cathode discharge current and consequently in the glow discharge current. In this mode of operation the electrical characteristic of this system of coupled discharges resembles that of a vacuum triode. Using the microhollow cathode discharge as plasma cathode it was possible to generate stable, direct current discharges in argon up to atmospheric pressure, with estimated electron densities in the range from 1011 to 1012 cm−3. The recently demonstrated parallel operation of these discharges indicates the potential of this technique for the generation of large volume plasmas at high gas pressure through superposition of individual glow discharges.</jats:p>

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