Effects of Ar dilution on the optical emission spectra of fluorocarbon ultrahigh-frequency plasmas : C_4F_8 vs CF_4

• NAKANO T.

収録刊行物

• J. Vac. Sci. Technol. A

  J. Vac. Sci. Technol. A 17 686-691, 1999

詳細情報

• CRID: 1570291226789327488
• NII論文ID: 80011100981
• データソース種別:
  • CiNii Articles