Electron-Drift Velocity Determination in CF_4 and SF_6 in a Strong Electric Field from Breakdown Curves of Low-Pressure RF Discharge

• LISOVSKIY V. A.

収録刊行物

• J. Phys. D : Appl. Phys.

  J. Phys. D : Appl. Phys. 32 2645-2648, 1999

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• CRID: 1572543026596672896
• NII論文ID: 80011377230
• データソース種別:
  • CiNii Articles