New combination of a three-component gas, Ne-Xe-Ar, for a high efficiency display panel
収録刊行物
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- J. Vac. Sci. Technol. A
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J. Vac. Sci. Technol. A 18 (2), 349-355, 2000
J. Vac. Sci. Technol. A 18 (2), 349-355, 2000