Control of self-assembling formation of nanometer silicon dots by low pressure chemical vapor deposition
Journal
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- Thin Solid Film
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Thin Solid Film 369 55-59, 2000
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Details 詳細情報について
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- CRID
- 1571980074967029504
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- NII Article ID
- 80012002715
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- Data Source
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- CiNii Articles