The study of fabrication of the x-ray mirror by numerically controlled plasma chemical vaporization machining: Development of the machine for the x-ray mirror fabrication

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  • Yuzo Mori
    Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
  • Kazuya Yamamura
    Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
  • Yasuhisa Sano
    Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

抄録

<jats:p>A numerically controlled plasma chemical vaporization machining (CVM) machine has been developed in order to fabricate ultrahigh accuracy x-ray mirror efficiently without making the deformed layer. In this machine, a gas bearing was applied to both of the rotary electrode for plasma generation and an XY table in order to maintain the cleanliness of the machining atmosphere. A silicon flat mirror for the x-ray was made by using developed machine. A value of 22.5 nm (p–v) was achieved as flatness. The CVM technique is more fully described in the accompanying article in this issue.</jats:p>

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