Molecular Rulers for Scaling Down Nanostructures

DOI Web Site 被引用文献62件
  • A. Hatzor
    Department of Chemistry, Penn State University, University Park, PA, 16802–6300, USA.
  • P. S. Weiss
    Department of Chemistry, Penn State University, University Park, PA, 16802–6300, USA.

抄録

<jats:p>A method of constructing <30-nanometer structures in close proximity with precise spacings is presented that uses the step-by-step application of organic molecules and metal ions as size-controlled resists on predetermined patterns, such as those formed by electron-beam lithography. The organic molecules serve as a ruler for scaling down a larger “parent” structure. After metal deposition and lift-off of the organic multilayer resist, an isolated smaller structure remains on the surface. This approach is used to form thin parallel wires (15 to 70 nanometers in width and 1 micrometer long) of controlled thickness and spacing. The structures obtained were imaged with field emission scanning electron microscopy. A variety of nanostructures could be scaled down, including structures with hollow patterns.</jats:p>

収録刊行物

  • Science

    Science 291 (5506), 1019-1020, 2001-02-09

    American Association for the Advancement of Science (AAAS)

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