Fabrication process of field emitter arrays using focused ion and electron beam induced reaction
収録刊行物
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- J. Vac. Sci. & Technol. B
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J. Vac. Sci. & Technol. B 19 (3), 933-935, 2001
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詳細情報
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- CRID
- 1573950399804312704
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- NII論文ID
- 80012554308
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- データソース種別
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- CiNii Articles