Deposition of diamond films at low pressure in a planar large-area microwave surface wave plasma source
収録刊行物
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- J. Vac. Sci. Technol. A
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J. Vac. Sci. Technol. A 19 (6), 2835-, 2001
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詳細情報
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- CRID
- 1571135650042574592
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- NII論文ID
- 80012694482
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- データソース種別
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- CiNii Articles