Theory of alignment by diffraction from superimposed dual gratings
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収録刊行物
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- J. Opt. Soc. Am.
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J. Opt. Soc. Am. 68 1716-1731, 1978
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- CRID
- 1570291226533427968
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- NII論文ID
- 80013988368
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- NII書誌ID
- AA00703979
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- データソース種別
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- CiNii Articles