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- Sten Heikman
- Department of Electrical and Computer Engineering and Materials Department, University of California, Santa Barbara, California 93106
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- Stacia Keller
- Department of Electrical and Computer Engineering and Materials Department, University of California, Santa Barbara, California 93106
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- Yuan Wu
- Department of Electrical and Computer Engineering and Materials Department, University of California, Santa Barbara, California 93106
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- James S. Speck
- Department of Electrical and Computer Engineering and Materials Department, University of California, Santa Barbara, California 93106
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- Steven P. DenBaars
- Department of Electrical and Computer Engineering and Materials Department, University of California, Santa Barbara, California 93106
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- Umesh K. Mishra
- Department of Electrical and Computer Engineering and Materials Department, University of California, Santa Barbara, California 93106
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抄録
<jats:p>The influence of AlGaN and GaN cap layer thickness on Hall sheet carrier density and mobility was investigated for Al0.32Ga0.68N/GaN and GaN/Al0.32Ga0.68N/GaN heterostructures deposited on sapphire substrates. The sheet carrier density was found to increase and saturate with the AlGaN layer thickness, while for the GaN-capped structures it decreased and saturated with the GaN cap layer thickness. A relatively close fit was achieved between the measured data and two-dimensional electron gas densities predicted from simulations of the band diagrams. The simulations also indicated the presence of a two-dimensional hole gas at the upper interface of GaN/AlGaN/GaN structures with sufficiently thick GaN cap layers. A surface Fermi-level pinning position of 1.7 eV for AlGaN and 0.9–1.0 eV for GaN, and an interface polarization charge density of 1.6×1013–1.7×1013 cm−2, were extracted from the simulations.</jats:p>
収録刊行物
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- Journal of Applied Physics
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Journal of Applied Physics 93 (12), 10114-10118, 2003-06-15
AIP Publishing
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詳細情報 詳細情報について
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- CRID
- 1363388846309525376
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- NII論文ID
- 80016014724
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- NII書誌ID
- AA00693547
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- ISSN
- 10897550
- 00218979
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