Mechanics of hydrogenated amorphous carbon deposits from electron-beam-induced deposition of a paraffin precursor

• DING W.

収録刊行物

• J. Appl. Phys.

  J. Appl. Phys. 98 (1), 1-7, 2005

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• CRID: 1571980076400780672
• NII論文ID: 80017572649
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  • CiNii Articles