Optical encoder calibration using lattice spacing and optical fringe derived from a scanning tunneling microscope and optical Interferometer
収録刊行物
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- Measurement Science and Technology
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Measurement Science and Technology 18 503-509, 2007
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- CRID
- 1574231876211946752
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- NII論文ID
- 80018657409
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- データソース種別
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- CiNii Articles