Plasma deposited thin films

Author(s)

• Mort, J.
• Jansen, F. (Frank), Ph. D.

Bibliographic Information

Plasma deposited thin films

editors, J. Mort, F. Jansen

CRC Press, c1986

Note

Includes bibliographies and index

Details

• NCID: BA01334220
• ISBN:
  • 0849351197
• LCCN: 86023264
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Boca Raton, Fla.
• Pages/Volumes: 245 p.
• Size: 26 cm
• Classification:
  • LCC : TK7872.T55
  • DC19 : 621.381/7
• Subject Headings:
  • LCSH : Thin film devices
  • LCSH : Vapor-plating
  • LCSH : Plasma engineering