Semiconductor-on-insulator and thin film transistor technology : symposium held December 3-6, 1985, Boston, Massachusetts, U.S.A.
著者
書誌事項
Semiconductor-on-insulator and thin film transistor technology : symposium held December 3-6, 1985, Boston, Massachusetts, U.S.A.
（Materials Research Society symposium proceedings, v. 53）
Materials Research Society, c1986
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注記
Includes bibliographies and indexes
内容説明・目次
内容説明
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book was first published in 2006.
目次
- Preface
- Acknowledgments
- Part I. Zone Melting and Recrystallization
- Part II. Heteroepitaxy and Porous Silicon
- Part III. Buried Oxide and Nitride by Implantation
- Part IV. Characterization of SOI Thin Films
- Part V. Device and Circuit Applications
- Author index
- Subject index.
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