Optical microlithographic technology for integrated circuit fabrication and inspection : 2-3 April 1987, The Hague, The Netherlands

著者

• Stover, Harry L.
• Wittekoek, Steven
• Association nationale de la recherche technique

書誌事項

Optical microlithographic technology for integrated circuit fabrication and inspection : 2-3 April 1987, The Hague, The Netherlands

Harry L. Stover, Steven Wittekoek, chairs/editors ; organized by ANRT--Association nationale de la recherche technique ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 811）

SPIE-the International Society for Optical Engineering, c1987

• pbk.

注記

Includes bibliographies and index

詳細情報

• NII書誌ID(NCID): BA1243085X
• ISBN:
  • 089252846X
• LCCN: 87061561
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: x, 211 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
  • DC19 : 621.381/73
• 件名:
  • LCSH : Integrated circuits -- Design and construction -- Congresses
  • LCSH : Microlithography -- Congresses
• 親書誌ID:
  • BA0022700X