Focused ion beams from liquid metal ion sources
Author(s)
Bibliographic Information
Focused ion beams from liquid metal ion sources
（Electronic & electrical engineering research studies, . Microengineering series ; 1）
Research Studies Press , Wiley, c1991
- : Wiley
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Note
Includes bibliographical references and index
Description and Table of Contents
Description
Provides an up-to-date review and analysis of liquid metal ion sources and their applications. The contents range from a discussion of the fundamental physics underlying operation of the liquid metal ion sources, through the technical details of their construction and manufacture to their performance characteristics. Their use in focused ion beam systems is covered in detail, including a discussion of the fundamentals of ion optical focusing column design and the various microengineering applications.
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