Micromachining of elements with optical and other submicrometer dimensional and surface specifications : 2-3 April, 1987, The Hague, The Netherlands
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Micromachining of elements with optical and other submicrometer dimensional and surface specifications : 2-3 April, 1987, The Hague, The Netherlands
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 803)
SPIE, c1987
- pbk.
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Papers delivered at a meeting held within the framework of the Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, Hague, 30 Mar. to 3 Apr., 1987
Includes bibliographical references and index