Diamond : electronic properties and applications

著者

書誌事項

Diamond : electronic properties and applications

edited by Lawrence S. Pan, Don R. Kania

（The Kluwer international series in engineering and computer science, Electronic materials, science and technology）

Kluwer Academic, c1995

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注記

Includes bibliographical references and index

内容説明・目次

内容説明

The use of diamond for electronic applications is not a new idea. As early as the 1920's diamonds were considered for their use as photoconductive detectors. However limitations in size and control of properties naturally limited the use of diamond to a few specialty applications. With the development of diamond synthesis from the vapor phase has come a more serious interest in developing diamond-based electronic devices. A unique combination of extreme properties makes diamond partiCularly well suited for high speed, high power, and high temperature applications. Vapor phase deposition of diamond allows large area films to be deposited, whose properties can potentially be controlled. Since the process of diamond synthesis was first realized, great progress have been made in understanding the issues important for growing diamond and fabricating electronic devices. The quality of both intrinsic and doped diamond has improved greatly to the point that viable applications are being developed. Our understanding of the properties and limitations has also improved greatly. While a number of excellent references review the general properties of diamond, this volume summarizes the great deal of literature related only to electronic properties and applications of diamond. We concentrate only on diamond; related materials such as diamond-like carbon (DLC) and other wide bandgap semiconductors are not treated here. In the first chapter Profs. C. Y. Fong and B. M. Klein discuss the band structure of single-crystal diamond and its relation to electronic properties.

目次

  • 1: Electronic and Vibrational Properties of Bulk Diamond
  • C.Y. Fong, B.M. Klein. 2: Diamond Surface
  • B. Pate. 3: Growth of CVD Diamond for Electronic Applications
  • L.S. Plano. 4: Doped Diamonds
  • K. Okano. 5: Defects in Diamond
  • W. Zhu. 6: Free Carrier Dynamics in Diamond
  • S. Han, L.S. Pan, D.R. Kania. 7: Thermal Conductivity of Diamond
  • J.E. Graebner. 8: Electrical Contacts to Diamond
  • T. Tachibana, J. Glass. 9: Electronic Device Processing
  • M.A. Plano. 10: Passive Diamond Electronic Devices
  • D.L. Freifus. 11: Active Diamond Electronic Devices
  • S. Grot. Appendix: Table A1. Properties of Semiconductors at 293 K. Index.

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