Microelectronic materials
Author(s)
Bibliographic Information
Microelectronic materials
（Graduate student series in materials science and engineering）
Institute of Physics, 1992, c1989
- : pbk.
Related Bibliography 1 items
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Microelectronic materials / C.R.M. Grovenor
BA07037705
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Microelectronic materials / C.R.M. Grovenor
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Note
"Reprinted with minor corrections 1992 (pbk)"--T.p. verso
Includes bibliographical references and index
Description and Table of Contents
Description
This practical book shows how an understanding of structure, thermodynamics, and electrical properties can explain some of the choices of materials used in microelectronics, and can assist in the design of new materials for specific applications. It emphasizes the importance of the phase chemistry of semiconductor and metal systems for ensuring the long-term stability of new devices. The book discusses single-crystal and polycrystalline silicon, aluminium- and gold-based metallisation schemes, packaging semiconductor devices, failure analysis, and the suitability of various materials for optoelectronic devices and solar cells.
Table of Contents
Preface, Chapter 1 Semiconducting Materials, Chapter 2 Contacts, Devices and Integrated Circuits, Chapter 3 The Growth of Single Crystals of Semiconducting Materials, Chapter 4 Polycrystalline Conducting Thin Films, Chapter 5 The Metallurgy of Aluminium- and Gold-based Metallisation Schemes, Chapter 6 Deposition and Properties of Insulating Films, Chapter 7 The Packaging of Semiconductor Devices, Chapter 8 Materials for Optoelectronic Devices, Chapter 9 Materials fo:r Solar Cells, Chapter 10 Failure Analysis and the Investigation of the *Structure and Composition of Microelectronic Materials, Index
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