Proceedings of the Third International Symposium on Microstructures and Microfabricated Systems

著者

• International Symposium on Microstructures and Microfabricated Systems
• Hesketh, P. J. (Peter J.)
• Barna, G.
• Hughes, Henry G.
• Electrochemical Society. Sensor Division
• Electrochemical Society. Electronics Division
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Meeting

書誌事項

Proceedings of the Third International Symposium on Microstructures and Microfabricated Systems

editors, P.J. Hesketh, G. Barna, H. G. Hughes

（Proceedings / [Electrochemical Society], v. 97-5）

Electrochemical Society, c1997

タイトル別名

Microstructures and microfabricated systems III

注記

"Sensor, Dielectric Science and Technology, and Electronics Divisions"

"Held at the 191st Meeting of the Electrochemical Society, May, 4-9th, 1997, in Montreal, Canada"--Pref

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA32342813
• ISBN:
  • 1566771323
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: vii, 217 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7874
  • DC20 : 621.381
• 件名:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Microstructure -- Congresses
  • LCSH : Micromechanics -- Congresses
• 親書誌ID:
  • BA01323290