Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California

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Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California

M. Edward Motamedi, Larry J. Hornbeck, Kristofer S.J. Pister, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, DARPA--Defense Advanced Research Projects Agency

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3008）

SPIE, c1997

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Includes bibliographical references and index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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