MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA

著者

• Motamedi, M. Edward
• Göring, Rolf
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International

書誌事項

MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA

M. Edward Motamedi, Rolf Göring, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4561）

SPIE, c2001

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA59272005
• ISBN:
  • 0819442895
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: xxv, 350 p.
• 大きさ: 28 cm
• 親書誌ID:
  • BA0022700X