Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA

著者

• Karam, Jean-Michel
• Yasaitis, John
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• Solid State Technology (Organization)
• Sandia National Laboratories

書誌事項

Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA

Jean-Michel Karam, John Yasaitis, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4174）

SPIE, c2000

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA61055677
• ISBN:
  • 0819438308
• LCCN: 2001267487
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: x, 524 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TJ1191.5
  • DC21 : 621.3815/2
• 件名:
  • LCSH : Micromachining -- Congresses
  • LCSH : Microfabrication -- Congresses
  • LCSH : Electromechanical devices -- Design and construction -- Congresses
• 親書誌ID:
  • BA0022700X