MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA

著者

• Motamedi, M. Edward
• Göring, Rolf
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• Solid State Technology (Organization)
• Sandia National Laboratories

書誌事項

MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA

M. Edward Motamedi, Rolf Göering, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] Sandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4178）

SPIE, c2000

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA61056206
• ISBN:
  • 0819438340
• LCCN: 2001267485
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: viii, 412 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
  • DC21 : 621.381
• 件名:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Miniature electronic equipment -- Congresses
  • LCSH : Micromechanics -- Congresses
  • LCSH : Optoelectronic devices -- Congresses
• 親書誌ID:
  • BA0022700X