Smart sensors, actuators, and MEMS : 19-21 May 2003, Maspalomas, Gran Canaria, Spain

Author(s)

• Chiao, Jung-Chih
• Varadan, Vijay K.
• Cané, Carles

Bibliographic Information

Smart sensors, actuators, and MEMS : 19-21 May 2003, Maspalomas, Gran Canaria, Spain

Jung-Chih Chiao, Vijay K. Varadan, Cané, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5116）

SPIE, c2003

• pt. 1
• pt. 2

Note

Includes bibliographical references and index

Details

• NCID: BA64014734
• ISBN:
  • 0819449768
  • 0819449768
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: 2 v.
• Size: 28 cm
• Parent Bibliography ID:
  • BA0022700X