Foundations of MEMS

Author(s)

    • Liu, Chang

Bibliographic Information

Foundations of MEMS

Chang Liu

Pearson/Prentice Hall, c2006

Available at  / 1 libraries

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Note

Includes bibliographical references and index

Details

  • NCID
    BA77278681
  • ISBN
    • 0131472860
  • LCCN
    2005048932
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Upper Saddle River, NJ
  • Pages/Volumes
    xxii, 530 p.
  • Size
    25 cm
  • Classification
  • Subject Headings
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